Air check 
Advantage
Nitrogen Trifluoride (NF3) Gas Monitor
- Detects Nitrogen Trifluoride at TLV levels
- Enhanced self-diagnostic capability decreases downtime and maintenance costs.
- “Smart” sensor electronics continuously checks sensor and system status.
- Built-in user selectable local dual level alarms with relay output.
- Local digital display
- 4-20 mA analog output.
- Low-cost renewable sensor
The PureAire Air check 
Advantage is
a compact, extractive gas monitoring system that’s ideal for continuously
and remotely monitoring gas cabinets, process tools, scrubber systems,
and other areas where maintenance access may be limited or undesirable.
Featuring a long life pyrolizer and sample pump, this reliable hazardous
gas detection system significantly reduces the labor and downtime commonly
associated with gas detector maintenance and service.
The instrument’s “smart” circuitry continuously monitors sensor cell
status and sampling system performance. Continuous sensor cell operation
is transmitted via 4-20mA signal to PureAire controllers, PLC’s or
remote alarm systems. Should a system error occur, the Air
check Advantage outputs
a 2mA signal to remote alarm/control systems to immediately alert control
room personnel.
The heart of the system is a smart renewable sensor cell linked to
a compact pyrolizer. Sample is drawn through the pyrolizer where Nitrogen
Trifluoride is thermally decomposed and converted into another gas
that is more easily detected electrochemically. Unlike competitive
Nitrogen Trifluoride detectors, which measure at the percent LEL levels,
the Air check Advantage measures
at the PPM OSHA TLV levels.
Low Annual Operation Cost
The PureAire Air check Advantage has
the lowest annual maintenance costs of any gas monitoring system on
the market. PureAire’s Renewable Sensor cells are easily recharged
with electrolyte right in the field at approximately 20% of the cost
of disposable sensor cell type systems. Recharge costs typically run
about $35.00 per sensor every 6 months. Combined with our built-in,
low power pyrolizer, and long life sample pump, the Air
check Advantage will
lower your annual operation costs. When compared to competitive gas
monitors, it will pay for itself in just a few years.
Connects to DCS and PLC Controls
The Air check Advantage transmits
continuous gas concentration levels to any distributive control system,
programmable logic controller or PureAire’s proprietary single and
multi-channel controllers. The monitoring system Monitor can be operated
remote up to 1,000 meters, 0.6 miles from centralized distributive
control systems.
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Measure Fluorine at the Source…
and All Points Downstream
The latest generation of plasma etching and chemical vapor deposition (CVD) tools use significantly greater amounts of nitrogen trifluoride (NF3) than their predecessors. And even though they convert NF3 with 99% efficiency, large volumes of unreacted fluorine gas are still dumped into the point-of-use and in-house scrubber systems, which unfortunately, were never designed to handle the high volumes of gas they’re now being hit with. The result? Scrubber breakthrough….and an obnoxious odor wafting around the building that is difficult to identify and even harder to eliminate...